Memory Cells Comprising A Programmable Field Effect Transistor Having A Reversibly Programmable Gate Insulator

ABSTRACT

A memory cell comprises an elevationally extending programmable field effect transistor comprising a gate insulator that is reversibly programmable into two programmable states characterized by two different V t &#39;s of the programmable transistor. The programmable transistor comprises a top source/drain region and a bottom source/drain region. A bottom select device is electrically coupled in series with and elevationally inward of the bottom source/drain region of the programmable transistor. A top select device is electrically coupled in series with and is elevationally outward of the top source/drain region of the programmable transistor. A bottom select line is electrically coupled in series with and is elevationally inward of the bottom select device. A top select line is electrically coupled in series with and is elevationally outward of the top select device. Other embodiments are disclosed.

TECHNICAL FIELD

Embodiments disclosed herein pertain to memory cells comprising aprogrammable field effect transistor having a reversibly programmablegate insulator.

BACKGROUND

Memory is one type of integrated circuitry, and is used in computersystems for storing data. Memory may be fabricated in one or more arraysof individual memory cells. Memory cells may be written to, or readfrom, using digit lines (which may also be referred to as bit lines,data lines, sense lines, or data/sense lines) and access lines (whichmay also be referred to as word lines). The digit lines may conductivelyinterconnect memory cells along columns of the array, and the accesslines may conductively interconnect memory cells along rows of thearray. Each memory cell may be uniquely addressed through thecombination of a digit line and an access line.

Memory cells may be volatile or non-volatile. Non-volatile memory cellscan store data for extended periods of time including when the computeris turned off. Volatile memory dissipates and therefore requires beingrefreshed/rewritten, in many instances multiple times per second.Regardless, memory cells are configured to retain or store memory in atleast two different selectable states. In a binary system, the statesare considered as either a “0” or a “1”. In other systems, at least someindividual memory cells may be configured to store more than two levelsor states of information.

A field effect transistor is one type of electronic component that maybe used in a memory cell. These transistors comprise a pair ofconductive source/drain regions having a semiconductive channel regionthere-between. A conductive gate is adjacent the channel region andseparated there-from by a thin gate insulator. Application of a suitablevoltage to the gate allows current to flow from one of the source/drainregions to the other through the channel region. When the voltage isremoved from the gate, current is largely prevented from flowing throughthe channel region. Field effect transistors may also include additionalstructure, for example reversibly programmable charge storage/trapregions as part of the gate construction between the gate insulator andthe conductive gate. Transistors other than field effect transistors,for example bipolar transistors, may additionally or alternately be usedin memory cells. Transistors may be used in many types of memory.Further, transistors may be used and formed in arrays other than memory.

One type of transistor is a ferroelectric field effect transistor(FeFET) wherein at least some portion of the gate construction (e.g.,the gate insulator) comprises ferroelectric material. Such materials arecharacterized by two stable polarized states. These different states infield effect transistors may be characterized by different thresholdvoltage (V_(t)) for the transistor or by different channel conductivityfor a selected operating voltage. Polarization state of theferroelectric material can be changed by application of suitableprogramming voltages, and which results in one of high channelconductance or low channel conductance. The high and low conductance,invoked by the ferroelectric polarization state, remains after removalof the gate programming voltage (at least for a time). The status of thechannel can be read by applying a small drain voltage which does notdisturb the ferroelectric polarization.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic top view of four memory cells in accordancewith an embodiment of the invention.

FIG. 2 is a sectional view taken through line 2-2 in FIG. 1.

FIG. 3 is a sectional view taken through line 3-3 in FIG. 1.

FIG. 4 is a diagrammatic top view of four memory cells in accordancewith an embodiment of the invention.

FIG. 5 is a sectional view taken through line 5-5 in FIG. 4.

FIG. 6 is a sectional view taken through line 6-6 in FIG. 4.

FIG. 7 is a sectional view taken through line 7-7 in FIG. 5.

FIG. 8 is a diagrammatic top view of four memory cells in accordancewith an embodiment of the invention.

FIG. 9 is a sectional view taken through line 9-9 in FIG. 8.

FIG. 10 is a sectional view taken through line 10-10 in FIG. 8.

FIG. 11 is a sectional view taken through line 11-11 in FIG. 9.

FIG. 12 is a diagrammatic sectional view of two memory cells inaccordance with an embodiment of the invention.

FIG. 13 is a diagrammatic top view of four memory cells in accordancewith an embodiment of the invention.

FIG. 14 is a sectional view taken through line 14-14 in FIG. 13.

FIG. 15 is a sectional view taken through line 15-15 in FIG. 13.

FIG. 16 is a sectional view taken through line 16-16 in FIG. 13.

FIG. 17 is a diagrammatic sectional view of four memory cells inaccordance with an embodiment of the invention.

FIG. 18 is a diagrammatic schematic of four memory cells and associatedcircuitry in accordance with an embodiment of the invention.

FIG. 19 is a view of a portion of the FIG. 18 schematic configured toread the programmed state of one of the memory cells.

FIG. 20 is a view of a portion of the FIG. 18 schematic configured towrite the one memory cell of FIG. 18 into one programmed state.

FIG. 21 is a view of a portion of the FIG. 18 schematic configured towrite the one memory cell of FIG. 18 into another programmed state thatis different from that of FIG. 20.

FIG. 22 is a diagrammatic schematic of four memory cells and associatedcircuitry in accordance with an embodiment of the invention.

FIG. 23 is a view of a portion of the FIG. 22 schematic configured toread the programmed state of one of the memory cells.

FIG. 24 is a view of a portion of the FIG. 22 schematic configured towrite the one memory cell of FIG. 22 into one programmed state.

FIG. 25 is a view of a portion of the FIG. 22 schematic configured towrite the one memory cell of FIG. 22 into another programmed state thatis different from that of FIG. 23.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

Embodiments of the invention encompass a memory cell, including an arrayof such memory cells. First embodiment memory cells are shown anddescribed with reference to FIGS. 1-3. A construction 10 comprises fourmemory cells 12 that have been fabricated relative to a base substrate11, which may comprise a semiconductor substrate. In the context of thisdocument, the term “semiconductor substrate” or “semiconductivesubstrate” is defined to mean any construction comprising semiconductivematerial, including, but not limited to, bulk semiconductive materialssuch as a semiconductive wafer (either alone or in assemblies comprisingother materials thereon), and semiconductive material layers (eitheralone or in assemblies comprising other materials). The term “substrate”refers to any supporting structure, including, but not limited to, thesemiconductive substrates described above. Various materials have beenformed as an elevational stack over base substrate 11. Materials may beaside, elevationally inward, or elevationally outward of the FIGS.1-3-depicted materials. For example, other partially or whollyfabricated components of integrated circuitry may be provided somewhereabout or within construction 10. Substrate 11 may comprise any one ormore of conductive/conductor/conducting (i.e., electrically herein),semiconductive, or insulative/insulator/insulating (i.e., electricallyherein) material(s). Regardless, any of the materials, regions, andstructures described herein may be homogenous or non-homogenous, andregardless may be continuous or discontinuous over any material whichsuch overlie. Further, unless otherwise stated, each material may beformed using any suitable or yet-to-be-developed technique, with atomiclayer deposition, chemical vapor deposition, physical vapor deposition,epitaxial growth, diffusion doping, and ion implanting being examples.

Memory cells 12 have been fabricated relative to a memory array ormemory array area 14. Control and/or other peripheral circuitry foroperating components within a memory array may also be fabricated, andmay or may not be wholly or partially within a memory array orsub-array. Further, multiple sub-arrays may also be fabricated andoperated independently, in tandem, or otherwise relative one another. Asused in this document, a “sub-array” may also be considered as an array.Only a portion of array 14 is shown having four memory cells 12 therein.Hundreds, thousands, or more memory cells would likely be fabricatedwithin array 14. The discussion largely proceeds with reference toattributes associated with a single memory cell 12.

An individual memory cell 12 comprises an elevationally extendingprogrammable field effect transistor 16. In this document,“elevationally extending” refers to a direction that is angled away byat least 45° from a primary surface relative to which a substrate isprocessed during fabrication and which may be considered to define agenerally horizontal direction. Further, “vertical” and “horizontal” asused herein are generally perpendicular directions relative one anotherindependent of orientation of the substrate in three dimensional space.Further in this document unless otherwise stated, “elevational(ly)”,“higher”, “upper”, “lower”, “top”, “atop”, “bottom”, “above, “below”,“under”, and “beneath” are generally with reference to the verticaldirection. Also, “elevationally extending” with respect to a fieldeffect transistor is with reference to orientation of the transistor'schannel length along which current flows in operation between thesource/drain regions. Elevationally extending programmable transistor 16comprises a conductive gate 18, a gate insulator 20, a channel region22, a top source/drain region 24, and a bottom source/drain region 26.Any suitable conductive materials may be used for gate 18, for exampleany one or more of conductively doped semiconductive materials, one ormore elemental metal(s), an alloy of two or more elemental metals, andconductive metal compounds. Channel region 22 may comprise any suitablydoped semiconductor material as may top and bottom source/drain regions24, 26, respectively, with suitably doped polysilicon or germanium beingexamples. An example source/drain region doping with conductivityenhancing impurity(ies) is peak p-type or n-type doping of at least1×10²⁰ atoms/cm³ to render the source/drain regions inherentlyelectrically conductive, with the peak channel doping being sufficientlyless to not be inherently conductive. In some embodiments, elevationallyextending transistor 16 is vertical or within 10° of vertical.

Gate insulator 20 is reversibly programmable into two (i.e., at leasttwo) programmable states characterized by two (i.e., at least two)different threshold voltages (V_(t)) of programmable transistor 16. Oneideal gate insulator material is programmable ferroelectric insulatormaterial. Example ferroelectric insulator materials includeferroelectrics that have one or more of transition metal oxide,zirconium, zirconium oxide, hafnium, hafnium oxide, lead zirconiumtitanate, and barium strontium titanate, and may have dopant thereinwhich comprises one or more of silicon, aluminum, lanthanum, yttrium,erbium, calcium, magnesium, strontium, and a rare earth element. Twospecific examples are Hf_(x)Si_(y)O_(z) and Hf_(x)Zr_(y)O_(z). Anotherexample such gate insulator material is non-ferroelectric programmablecharge-trapping insulator material, for example silicon nitride andother materials used as programmable material in charge trap flashtransistors.

Memory cell 12 comprises a bottom select device 30 electrically coupledin series (i.e., electrical) with and elevationally inward of bottomsource/drain region 26 of programmable transistor 16. Reference to“elevationally inward” with respect to the bottom select device onlyrequires that some portion of such be lower than bottom source/drainregion 26, with the bottom select device and programmable transistorperhaps elevationally overlapping or sharing a feature (e.g., an examplefeature being a source/drain region as explained below). In thisdocument, regions/materials/components are “electrically coupled”relative one another if in normal operation electric current is capableof continuously flowing from one to the other, and does so predominatelyby movement of subatomic positive and/or negative charges when such aresufficiently generated. Another electronic component may be between andelectrically coupled to the regions/materials/components. In contrast,when regions/materials/components are referred to as being “directlyelectrically coupled”, no intervening electronic component (e.g., nodiode, transistor, resistor, transducer, switch, fuse, etc.) is betweenthe directly electrically coupled regions/materials/components. Memorycell 12 includes a top select device 32 electrically coupled in serieswith and elevationally outward of top source/drain region 24 ofprogrammable transistor 16. Reference to “elevationally outward” withrespect to the top select device only requires that some portion of suchbe higher than top source/drain region 24, with the top select deviceand programmable transistor perhaps elevationally overlapping or sharinga feature.

The bottom select device and the top select device may be of twodifferent type electrical components (not shown) or may be of the sametype electrical component (as shown). In one embodiment and as shown,bottom select device 30 and top select device 32 are the same typeelectrical component, with FIGS. 1-3 showing such component type to be afield effect transistor and which in one embodiment is non-programmable.The field effect transistors of bottom select device 30 and top selectdevice 32 comprise conductive gates 34, a gate insulator 36 (e.g.,homogenous silicon dioxide if non-programmable), and a channel region38.

Bottom field effect transistor 30 comprises a top source/drain region 26and a bottom source/drain region 42. Top field effect transistor 32comprises a top source/drain region 40 and a bottom source/drain region24. Accordingly and in one embodiment, source/drain region 26 comprisesa shared source/drain region of programmable transistor 16 and bottomtransistor 30 (e.g., a shared feature) thereby electrically couplingbottom transistor 30 and programmable transistor 16 in series with oneanother. Analogously, source/drain region 24 comprises a sharedsource/drain region electrically coupling top transistor 32 andprogrammable transistor 16 in series with one another.

Any of transistors 32, 16, and 30 (i.e., individually and/orcollectively) may be a junction transistor or a junction-lesstransistor.

An example lateral thickness for conductive material of each of gates 18and 34 is 50 Angstroms. In this document, “thickness” by itself (nopreceding directional adjective) is defined as the mean straight-linedistance through a given material or region perpendicularly from aclosest surface of an immediately adjacent material of differentcomposition or of an immediately adjacent region. Additionally, thevarious materials or regions described herein may be of substantiallyconstant thickness or of variable thicknesses. If of variable thickness,thickness refers to average thickness unless otherwise indicated, andsuch material or region will have some minimum thickness and somemaximum thickness due to the thickness being variable. An exampleelevational thickness for each of gates 18 and 34 is 1,000 to 1,500Angstroms. An example lateral thickness for material of programmablegate insulator 20 is from 200 to 250 Angstroms, with an exampleelevational thickness being the same as that of gate 18. One morespecific example for programmable gate insulator 20 is a 10 to 50Angstroms laterally thick layer of SiO₂ proximate channel region 22 anda 200 Angstroms laterally thick layer of ferroelectric HfO₂ immediatelyradially outward thereof. An example lateral thickness for material ofgate insulator 36 is from 10 to 50 Angstroms (for non-programmable),with an example elevational thickness being the same as that of gate 34.Lateral and elevational thicknesses of the gate insulators and theconductive gates of transistors 32, 16, and 30 are shown to be the samefor convenience and clarity in the drawings, although such need not beso. An example elevational thickness for each of source/drain regions40, 24, 26, and 42 is 1,000 Angstroms to 1,500 Angstroms, and such neednot be of the same elevational thickness.

In one embodiment and as shown, conductive gates 34 and gate insulator36 of top and bottom transistors 32, 30, respectively, completelyencircle their respective channel regions 38. In one embodiment and asshown, conductive gate 18 and programmable gate insulator 20 completelyencircle channel region 22. An example diameter for each channel region38 and 22, and for each source/drain region 40, 24, 26, and 42, is from300 Angstroms to 500 Angstroms. The pillar from which such channelregions and source/drain regions have been formed is shown as beingcircular in horizontal cross-section, although any alternate shape(s)may be used.

Memory cell 12 comprises a bottom select line 46 electrically coupled,and in one embodiment directly electrically coupled, in series with andelevationally inward of bottom transistor/select device 30. Reference to“elevationally inward” with respect to bottom select line 46 onlyrequires that some portion of such be lower than bottom select device30, with the bottom select line and bottom select device perhapselevationally overlapping (not shown) or the bottom select line formingsome portion of the bottom select device (not shown). Memory cell 12includes a top select line 48 electrically coupled, and in oneembodiment directly electrically coupled, in series with andelevationally outward of top transistor/select device 32. Reference to“elevationally outward” with respect to top select line 48 only requiresthat some portion of such be higher than top select device 32, with thetop select line and top select device perhaps elevationally overlapping(not shown) or the top select line forming some portion of the topselect device (not shown). Dielectric 25 (e.g., silicon dioxide and/orsilicon nitride) is shown about the various features elevationallybetween and about bottom select line 46 and top select line 48.

An alternate embodiment memory cell 12 a is shown with respect to aconstruction 10 a in FIGS. 4-7. Like numerals from the above-describedembodiments have been used where appropriate, with some constructiondifferences being indicated with the suffix “a” or with differentnumerals. Channel region 22 of programmable transistor 16 a and channelregion 38 of top and bottom transistors 30, 32, respectively, are shownas being square or rectangular in horizontal cross-sections for clarityin the figures, although such would more likely be circular andregardless may be of any other shape in horizontal cross-section.Accordingly in FIGS. 4-7, many of the transistor features radiallyoutward of channel regions 22 and 38 are shown as having portionsextending along straight horizontal lines in horizontal cross-section,whereas the embodiments of FIG. 1 show analogous such components asextending along arc or semi-circle segments in horizontal cross-sectiondue to the circular-depicted horizontal cross sections of the channels.Regardless, in the embodiments of FIGS. 4-7, conductive gate 18 a doesnot completely encircle channel region 22, and in one embodiment asshown programmable gate insulator 20 also does not completely encirclechannel region 22 a. In one embodiment, a conductive electrode 52 isdirectly against channel region 22 at a circumferential location whereconductive gate 18 a is not encircling over channel region 22 a, and inone embodiment as shown with gate 18 a and electrode 52 beingdiametrically opposed with respect to one another. Conductive materialof electrode 52 may be of any suitable composition as described abovewith respect to conductive gate 18. Conductive electrode 52 may extendas an elongated line parallel diametrically opposed gate line 18 a to bedirectly against multiple channels 22 of different programmabletransistors 16 a, for example as shown. In operation, conductiveelectrode 52 may be provided at a suitable potential (e.g., positive,negative, or ground) to prevent voltage of channel region 22 fromfloating during operation. FIGS. 1-3 illustrate an example embodimentwhere no electrode is directly against channel region 22, whereby suchchannel region of programmable transistor 16 may have floating voltagein operation. Regardless, any other attribute(s) or aspect(s) as shownand/or described above may be used.

FIGS. 4-7 illustrate an embodiment wherein electrode 52 does not extendto be directly against either of top source/drain region 24 or bottomsource/drain region 26 of programmable transistor 16. Alternately, inone embodiment, the electrode may extend to be directly against only oneof the top source/drain region or the bottom source/drain region of theprogrammable transistor, for example as shown in an embodiment of aconstruction 10 b in FIGS. 8-11. Like numerals from the above-describedembodiments have been used where appropriate, with some constructiondifferences being indicated with the suffix “b” or with differentnumerals. Specifically, conductive electrode 52 b of programmabletransistor 16 b is shown extending to be directly against topsource/drain region 24, and by way of example only is shown ascomprising a conductive extension 53 of different composition conductivematerial from that of material immediately there-below. Alternately suchmay be of the same material and, for example, be homogenous. Regardless,while FIGS. 8-11 show electrode 52 b extending to be directly againsttop source/drain region 24, such may alternately extend to be directlyagainst only bottom source/drain region 26. Regardless, such aconstruction might be used to prevent channel voltage from floatingduring operation as always being tied to one source/drain voltage. Anyother attribute(s) or aspect(s) as shown and/or described above may beused.

FIG. 12 shows an alternate embodiment construction 10 c comprising amemory cell 12 c in comparison to FIG. 2 of the FIGS. 1-3 construction.Like numerals from the above-described embodiments have been used whereappropriate, with some construction differences being indicated with thesuffix “c” or with different numerals. Memory cell 12 c is shown ascomprising a top select device 32 c and a bottom select device 30 c eachbeing in the form of a diode individually comprising opposing conductiveelectrodes 56 having a material 58 there-between. By way of example,material 58 may comprise suitable semiconductive material such as dopedor undoped silicon, thereby forming an MSM diode, or alternately maycomprise opposing insulator layers (e.g., Al₂O₃) having semiconductormaterial there-between forming an MISIM diode. Other diodes andnon-diodes may be used for the top and bottom select devices. In oneembodiment, one of the top or bottom select device is a diode and theother of the top and bottom select device is a field effect transistor(not shown).

An alternate embodiment memory cell 12 d of a construction 10 d is nextdescribed with reference to FIGS. 13-16. Like numerals from theabove-described embodiments have been used where appropriate, with someconstruction differences being indicated with the suffix “d” or withdifferent numerals. Memory cell 12 d comprises a horizontally extendingprogrammable field effect transistor 16 d. In this document,“horizontally extending” refers to a direction that is angled away byless than 45° from the primary surface relative to which the substrateis processed during fabrication. Also, “horizontally extending” withrespect to a field effect transistor is with reference to orientation ofthe channel length along which current flows between the source/drainregions in operation. In some embodiments, horizontally extendingtransistor 16 d is horizontal or within 10° of horizontal. Basesubstrate 11 may comprise semiconductor material, for examplemonocrystalline silicon. A dielectric 60 (e.g., silicon dioxide and/orsilicon nitride) has been formed over base substrate 11. Gate insulator20 is again reversibly programmable into two programmable statescharacterized by two different V_(t)'s of programmable transistor 16 d.Programmable transistor 16 d comprises one source/drain region 24 d onone lateral side of transistor 16 c (e.g., FIG. 16 and the left side inFIG. 14) and another source/drain region 26 d on another lateral side ofprogrammable transistor 16 d (e.g., FIG. 15 and the right side in FIG.14).

One select device 30 electrically couples, and in one embodimentdirectly electrically couples, in series with one source/drain region 24d of programmable transistor 16 d. Select device 30 is on the samelateral side of programmable transistor 16 d as source/drain region 24 dand is elevationally outward of programmable transistor 16 d. Anotherselect device 32 is electrically coupled, in one embodiment directlyelectrically coupled, in series with other source/drain region 26 d ofprogrammable transistor 16 d. Other select device 30 is on the sameother lateral side of programmable transistor 16 d as source/drainregion 26 d and is elevationally outward of programmable transistor 16d. One elevationally outer select line 46 is electrically coupled (e.g.,directly as shown) in series with and elevationally outward of selectdevice 30. Another elevationally outer select line 48 is electricallycoupled (e.g., directly as shown) in series with and elevationallyoutward of other select device 32. Example conductors 49 are showndirectly electrically coupling source/drain regions 40 with select lines46 and 48, and source/drain regions 42 with select lines 48. In oneembodiment, the one and another select devices 30, 32 are at the sameelevation relative to one another, for example as shown. In oneembodiment, the one and another select lines 46, 48 are at the sameelevation relative one another, for example as shown.

Any other attribute(s) or aspect(s) as shown and/or described above maybe used. For example and by way of example only, select devices otherthan field effect transistors may be used in the FIGS. 13-16 embodiments(not shown). Also, the embodiment of FIGS. 13-16 shows an exampleconstruction where an electrode 52 d is directly against channel region22 and extends to only one of the source/drain regions (e.g., region 24d) of programmable transistor 16 d, although any of the other exampleembodiments described above may be used.

An embodiment of the invention also comprises an array of any suchmemory cells described above. In one such embodiment, such an arraycomprises at least two decks of such memory cells that are individuallyelevationally over or under one another, for example as shown in FIG. 17with respect to a construction 10 e. Like numerals from theabove-described embodiments have been used where appropriate, with someconstruction differences being indicated with the suffix “e” or withdifferent numerals. FIG. 17 shows construction analogous to that shownby FIG. 2, although other constructions may be used. FIG. 17 shows anelevationally inner deck 70 and an elevationally outer deck 72 havingdielectric material 71 (e.g., silicon dioxide and/or silicon nitride)there-between. Any other attribute(s) or aspect(s) as shown and/ordescribed above may be used.

FIG. 18 shows an example schematic of the FIGS. 1-3 construction, and asbut one example. In one embodiment and as shown, the top and bottomtransistors have their respective conductive gates permanently shuntedtogether in the memory cell. Alternately, the top conductive gate andthe bottom conductive gate may not be permanently shunted together (notshown). The FIG. 18 schematic shows gates 18 of programmable transistors16 and gates 34 of select transistors 30, 32 extending to connect withexample decoder circuitry 75, with select lines 46 and 48 extending toconnect with example sense line decoders, sense amp circuitry, andprogram circuitry 77. Circuitry 75 and/or circuitry 77 might be underthe array or to the side (e.g., laterally peripheral) of the array ofmemory cells in any of the embodiments.

FIG. 19 shows example voltage applications for reading a selected memorycell 112 (e.g., determining the V_(t) state of the selected memorycell). FIGS. 20 and 21 show example programming voltages to writeselected memory cell 112 to a low V_(t) state (FIG. 20) and to a highV_(t) state (FIG. 21).

FIG. 22 shows an example schematic of the FIG. 12 construction where theselect devices comprise diodes 30 c, 32 c. FIGS. 23, 24, and 25 showexample read and write voltages corresponding to FIGS. 19, 20, and 21,respectively, with respect to a selected memory cell 212.

CONCLUSION

In some embodiments, a memory cell comprises an elevationally extendingprogrammable field effect transistor comprising a gate insulator that isreversibly programmable into two programmable states characterized bytwo different V_(t)'s of the programmable transistor. The programmabletransistor comprises a top source/drain region and a bottom source/drainregion. A bottom select device is electrically coupled in series withand is elevationally inward of the bottom source/drain region of theprogrammable transistor. A top select device is electrically coupled inseries with and is elevationally outward of the top source/drain regionof the programmable transistor. A bottom select line is electricallycoupled in series with and is elevationally inward of the bottom selectdevice. A top select line is electrically coupled in series with and iselevationally outward of the top select device.

In some embodiments, a memory cell comprises an elevationally extendingprogrammable field effect transistor comprising a gate insulator that isreversibly programmable into two programmable states characterized bytwo different V_(t)'s of the programmable transistor. The programmabletransistor comprises a top source/drain region and a bottom source/drainregion. A bottom field effect transistor comprises and shares the bottomsource/drain region of the programmable transistor thereby electricallycoupling the bottom transistor and the programmable transistor in serieswith one another. A top field effect transistor comprises and shares thetop source/drain region of the programmable transistor therebyelectrically coupling the top transistor and the programmable transistorin series with one another. A bottom select line is electrically coupledin series with and elevationally inward of the bottom transistor. A topselect line is electrically coupled in series with and elevationallyoutward of the top transistor.

In some embodiments, a memory cell comprises a horizontally extendingprogrammable field effect transistor comprising a gate insulator that isreversibly programmable into two programmable states characterized bytwo different V_(t)'s of the programmable transistor. The programmabletransistor comprises one source/drain region on one lateral side of theprogrammable transistor and another source/drain region on anotherlateral side of the programmable transistor that is opposite the onelateral side. One select device is electrically coupled in series withthe one source/drain region of the programmable transistor. The oneselect device is on the one lateral side and is elevationally outward ofthe programmable transistor. Another select device is electricallycoupled in series with the another source/drain region of theprogrammable transistor. The another select device is on the anotherlateral side and is elevationally outward of the programmabletransistor. One elevationally outer select line is electrically coupledin series with and elevationally outward of the one select device.Another elevationally outer select line is electrically coupled inseries with and elevationally outward of the another select device.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

1-23. (canceled)
 24. A memory cell, comprising: a horizontally extendingprogrammable field effect transistor comprising a gate insulator that isreversibly programmable into two programmable states characterized bytwo different V_(t)'s of the programmable transistor, the programmabletransistor comprising one source/drain region on one lateral side of theprogrammable transistor and another source/drain region on anotherlateral side of the programmable transistor that is opposite the onelateral side; one select device electrically coupled in series with theone source/drain region of the programmable transistor, the one selectdevice being on the one lateral side and elevationally outward of theprogrammable transistor; another select device electrically coupled inseries with the another source/drain region of the programmabletransistor, the another select device being on the another lateral sideand elevationally outward of the programmable transistor, the one selectdevice and the another select device each comprising a diode; oneelevationally outer select line electrically coupled in series with andelevationally outward of the one select device; and anotherelevationally outer select line electrically coupled in series with andelevationally outward of the another select device.
 25. The memory cellof claim 24 wherein the one and another select devices are at the sameelevation relative one another.
 26. The memory cell of claim 24 whereinthe one and another select lines are at the same elevation relative oneanother.
 27. A memory cell, comprising: a horizontally extendingprogrammable field effect transistor comprising a gate insulator that isreversibly programmable into two programmable states characterized bytwo different V_(t)'s of the programmable transistor, the programmabletransistor comprising one source/drain region on one lateral side of theprogrammable transistor and another source/drain region on anotherlateral side of the programmable transistor that is opposite the onelateral side; one select device electrically coupled in series with theone source/drain region of the programmable transistor, the one selectdevice being on the one lateral side and elevationally outward of theprogrammable transistor; another select device electrically coupled inseries with the another source/drain region of the programmabletransistor, the another select device being on the another lateral sideand elevationally outward of the programmable transistor; oneelevationally outer select line electrically coupled in series with andelevationally outward of the one select device; another elevationallyouter select line electrically coupled in series with and elevationallyoutward of the another select device; and the programmable transistorhaving a channel region, and further comprising a conductive electrodedirectly against the channel region, the electrode extending to bedirectly against only one of the one or another source/drain region ofthe programmable transistor.
 28. The memory cell of claim 27 wherein theone and another select device each comprise an elevationally extendingtransistor.
 29. The memory cell of claim 28 wherein each of theelevationally extending transistors is vertical or within 10° ofvertical.
 30. The memory cell of claim 28 wherein the horizontallyextending programmable field effect transistor is horizontal or within10° of horizontal.
 31. The memory cell of claim 24 wherein the gateinsulator comprises programmable ferroelectric insulator material. 32.The memory cell of claim 24 wherein the gate insulator comprisesprogrammable charge trapping insulator material.
 33. A memory cell,comprising: a horizontally extending programmable field effecttransistor comprising a gate insulator that is reversibly programmableinto two programmable states characterized by two different V_(t)'s ofthe programmable transistor, the programmable transistor comprising onesource/drain region on one lateral side of the programmable transistorand another source/drain region on another lateral side of theprogrammable transistor that is opposite the one lateral side; oneselect device electrically coupled in series with the one source/drainregion of the programmable transistor, the one select device being onthe one lateral side and elevationally outward of the programmabletransistor; another select device electrically coupled in series withthe another source/drain region of the programmable transistor, theanother select device being on the another lateral side andelevationally outward of the programmable transistor; one elevationallyouter select line electrically coupled in series with and elevationallyoutward of the one select device; another elevationally outer selectline electrically coupled in series with and elevationally outward ofthe another select device; and the one select device and the anotherselect device are two different type electrical components, one of thetwo different type electrical components being a field effecttransistor, another of the two different type electrical components notbeing a field effect transistor. 34-35. (canceled)
 36. A memory cell,comprising: a horizontally extending programmable field effecttransistor comprising a gate insulator that is reversibly programmableinto two programmable states characterized by two different V_(t)'s ofthe programmable transistor, the programmable transistor comprising onesource/drain region on one lateral side of the programmable transistorand another source/drain region on another lateral side of theprogrammable transistor that is opposite the one lateral side; oneselect device electrically coupled in series with the one source/drainregion of the programmable transistor, the one select device being onthe one lateral side and elevationally outward of the programmabletransistor; another select device electrically coupled in series withthe another source/drain region of the programmable transistor, theanother select device being on the another lateral side andelevationally outward of the programmable transistor; one elevationallyouter select line electrically coupled in series with and elevationallyoutward of the one select device; another elevationally outer selectline electrically coupled in series with and elevationally outward ofthe another select device; and the one and another select device areeach non-programmable field effect transistors having a respectiveconductive gate, a respective channel region, and a respective gateinsulator there-between; the respective conductive gates and respectivegate insulator completely encircling their respective channel regions.37. The memory cell of claim 24 comprising an array of such memorycells.
 38. A memory cell, comprising: a horizontally extendingprogrammable field effect transistor comprising a gate insulator that isreversibly programmable into two programmable states characterized bytwo different V_(t)'s of the horizontally extending programmabletransistor, the horizontally extending programmable transistorcomprising one source/drain region on one lateral side of thehorizontally extending programmable transistor and another source/drainregion on another lateral side of the horizontally extendingprogrammable transistor that is opposite the one lateral side; oneelevationally extending field effect transistor comprising and sharingthe one source source/drain region of the horizontally extendingprogrammable transistor thereby directly electrically coupling the oneelevationally extending field effect transistor and the horizontallyextending programmable transistor in series with one another, the oneelevationally extending field effect transistor being on the one lateralside and elevationally outward of the horizontally extendingprogrammable transistor; another elevationally extending field effecttransistor comprising and sharing the another source/drain region of thehorizontally extending programmable transistor thereby directlyelectrically coupling the another elevationally extending field effectanother transistor and the horizontally extending programmabletransistor in series with one another, the another elevationallyextending field effect transistor being on the another lateral side andelevationally outward of the horizontally extending programmabletransistor; one elevationally outer select line electrically coupled inseries with and elevationally outward of the one elevationally extendingfield effect transistor; and another elevationally outer select lineelectrically coupled in series with and elevationally outward of theanother elevationally extending field effect transistor.
 39. The memorycell of claim 38 wherein the one and another elevationally extendingfield effect transistor are non-programmable.
 40. The memory cell ofclaim 38 wherein the one and another elevationally extending fieldeffect transistor are vertical or with 10° of vertical.